Adjusting the Image

The MIRO canvas offers a wide range of options in terms of image contrast, color, opacity… Beyond the aesthetic aspect, it can be very useful to check if the AFM and optical images exactly overlap each other, by selecting an AFM channel—deflection or amplitude usually gives the best contrast—and setting the opacity parameter to zero. Then progressively increase this value to see the AFM image appear.

	Save the registration file once the optical images have been adjusted for optimal registration.
	Another helpful option is to select two AFM channels (for instance Amplitude Error and Phase) and use this function to alternately switch from one channel to the other. These functions are available both in real-time and offline.

(Hover over the image to view larger)

(Hover over the image to view larger)

After the first AFM scan, a second scan can be performed (by clicking the Offset/Resize the Scan icon to direct the AFM to a new area on the original image). The new image is then integrated into the optical image with the previous AFM data:

(Hover over the image to view larger)

Three methods are available to obtain good overlay accuracy between AFM images and optical images:

• You can adjust the numerical parameters in the Registration tab to make the AFM images fit the optical images.
• You can drag, resize and rotate the selected image box on the Canvas by using the mouse (in Cursor mode; see Moving Images).
• Use the keyboard shortcuts described in Moving Images.

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